| Parts name | Parts number | Tool type | Description | Picture |
|---|---|---|---|---|
| DAMPER UNIT for S-6100 & S-6200 | JT1-8002 | S-6100/S-6200 | P/N 566-0942 |  |
| ARM A | JT6-5005 | S-6600/S-6700 | P/N 01G-7345 |  |
| 磁流體 07584H 93840K | JT4-3004 | S-6XXX/S-7XXX | P/N 545-1048 |  |
| Leak Valve USG3-X0693 | JT3-0018 | S-6XXX |  |
|
| Auto Loader Assy | JT1-8021 | S-6100/S-6200 | P/N 545-0141 |  |
| HITACHI TIP | JT1-1010 | New |  |
|
| DENKA TIP | JT1-1000 | S-88XX,S-92XX,S-93XX | New |  |
| MECS ROBOT | JT5-1029 | S-88XX | Refurbished |  |
| MECS ROBOT CONTROLLR | JT5-1030 | S-88XX | Refurbished |  |
| MECS OF250 ALIGNER | JT5-1031 | S-88XX | Refurbished |  |
